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WinWinTec  >  Produkte  >  Compact optical roughness sensor as process integrated systems – horos

 
           
      Compact optical roughness sensor as process integrated systems – horos    
   

The horos enables high-sensitive measurements of the angle resolved light scattering distribution of optical and non-optical surfaces, coatings and materials at a wavelength of 660 nm in a cone (half opening angle < 10°) around the specularly reflected light of a sample.

The measurement of light scattering on technical surfaces and optical components places high demands on the measurement technology. A high dynamic range and linearity (at least 5 orders of magnitude) must be adressable, in combination with high sensitivity (noise equivalent ARS ~ 10 – 5 sr-1) corresponding to low scatter losses and roughness at sub-nanometer level, as well as with ultra-short measurements times (< 1s per measuring area). In horos we combine all these top parameters in one system.

 

Scheme of the scattering sensor

Specifications:

Illumination wavelength: e.g. 650 nm

Sensitivity: ARS < 10 -4 sr -1, rms < 0.5 nm

Working distance: > 10 mm

Measurement time: < 1 s

Calibrated quantitative measurements

Compact dimensions: 200 × 170 × 65 mm³

Option: combination with robotic arm

 

Applications:

Integration of sensor directly in optical fabrication processes for quality control

Fully automated measurements of plane and freeform surfaces based on CAD data

Defect characterization according to standard ISO 10110-7

Detection of small particles (e.g. single bacterial cells and others)

 

 

Scattering image (ARS) of superpolished Si-wafer

 

Sensor mounted on 6 axis robot. By courtesy of Fraunhofer IOF Jena

 

 

 

 

   
     
 

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